The mechanisms of charge and charge compensation are discussed : we suggest electron stimulated desorption ( esd ) at the surface and inner defects induced by the electron beam bombardment are main reasons of charge 对ys - zro2样品加热到230 ，使其表面充电得到改善。本文讨论了在电子束辐照下， al2o3 、 sio2 、 ys - zro2等氧化物材料的充电机制，以及氧环境的充电补偿机制。
